Inspection Planning publications


  • Gudmundsson, D., Zhang, M.T., Yield Optimal Dynamic Sampling: Modeling, Algorithm, Software, and ROI Analysis. ISMI Symposium on Manufacturing Effectiveness, October 2009.
  • Gudmundsson, D., Inspection and metrology capacity allocation in the full production and ramp phases of semiconductor manufacturing. Ph.D. Thesis. Industrial Engineering and Operations Research, University of California, Berkeley, CA.,2005. Withheld by Univ. of California for patent review through 2007.
  • Gudmundsson, D., Shanthikumar, J.G. Integrated process and inspection/metrology capacity planning. IEEE International Symposium on Semiconductor Manufacturing, San Jose, California, September 13-15, 2005.
  • Gudmundsson, D., Shanthikumar, J.G. Improving the deployment of inspection; tutorial on inspection capacity and sample planning. IEEE International Symposium on Semiconductor Manufacturing, San Jose, California, September 13-15, 2005.
  • Bhattacharyya, K.; Son, K.; Eynon, B; Gudmundsson, D.; Jaehnert, C; Uhlig, D. A Reticle Quality Management Strategy in Wafer Fabs Addressing Progressive Mask Defect Growth Problem at low k1 Lithography. 24th Annual BACUS Symposium on Photomask Technology, Monterey, California, September 2004. Proceedings of SPIE.
  • Spicer, R., Gudmundsson, D., Nurani, R. Time-to-Detect Frames the Integrated Debate. KLA-Tencor Yield Management Solutions, Vol 4, Issue 1, Winter 2002, p. 42-51.
  • Anantha Sethuraman, Sagar A. Kekare, Raman Nurani & Dadi Gudmundsson. Process Control and Defect Inspection Strategies for 300mm Fabs. Semiconductor Fabtech 15, Winter 2001, p. 169-177.
  • Spicer, Ralph., Gudmundsson, Dadi., Nurani, Raman. 300mm fab automation can meet advanced defect detection needs. Solid State Technology, Vol. 44, No. 10, October 2001, p. 54-61.
  • Louis Breaux, Ingrid, Peterson, Meryl Stoller, Dadi Gudmundsson, Raman Nurani, Scott Ashkenaz. Comprehensive Cost-Effective Photo Defect Monitoring Strategy. IEEE International Symposium on Semiconductor Manufacturing, San Jose, California, October 8-10, 2001, p. 67-70.
  • Gudmundsson, D., Narayanswami, N., Nurani, R., Sethuraman, A., Shirey, M. Defect Sample Planning in 300 mm Fabs. KLA-Tencor Yield Management Solutions, Vol 3, Issue 2, Spring 2001, p. 41-45.
  • Nurani, R., Gudmundsson, D., Stoller, M., Shanthikumar, G. Intelligent Sampling Strategies for Integrated Optical/E-beam Inspection. KLA-Tencor Yield Management Solutions, Vol 2, Issue 2, Spring 2000, p. 28 – 30.
  • Gudmundsson, Dadi., Goldberg, Ken. Tuning Robotic Part Feeder Parameters to Maximize Throughput. Assembly Automation Journal, Vol 19, No. 3, 1999, p. 216 – 221. (Received the Literati club award for excellence in 2000. A republication of the ’97 IEEE/ICRA paper).
  • Nurani, Raman K., Stoller, M., Gudmundsson, D., and Shanthikumar, J.G. “Evaluating Inspection Strategies Using Advanced Statistical Methods”. KLA-Tencor Yield Management Solutions, Vol 1, Issue 3, Spring 1999, p. 12-14.
  • Williams, R., Gudmundsson, D., Monahan, K., Nurani, R., Stoller, M., Shanthikumar, G. Optimized Sample Planning for Wafer Defect Inspection. IEEE International Symposium on Semiconductor Manufacturing, Santa Clara , California, October 11-13, 1999.
  • Gudmundsson, D., Merritt J., Nurani, R., Samek, V., Shiffler, B., Tomlinson, W., Shanthikumar, G. Cost Effective Reticle Quality Management Strategies in Wafer Fabs. The 10th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, September 8 – 10, 1999.
  • Elliott, R., Nurani, R., Gudmundsson, D., Preil, M., Nasongkhla, R., Shanthikumar, G. Critical dimension sample planning for sub-0.25 micron processes. Proceedings of the 10th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, September 8 – 10, 1999.
  • Williams, R.R., Gudmundsson, D., Nurani, R.K., Stoller, M., Chatterjee, A., Seshadri, S., Shanthikumar, J.G. “Challenging the Paradigm of Monitor Reduction to Achieve Lower Product Costs”. The 10th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, September 8 – 10, 1999.
  • Seshadri, S., Chatterjee, A., Gudmundsson, D., Nurani, R., Shanthikumar, G. Fabless-Foundry Partnership: Models and Analysis of Coordination Issues IEEE Transactions on Semiconductor Manufacturing, vol. 12, No. 1, February 1999.
  • Gudmundsson, D., Goldberg, K. Estimating and Optimizing Throughput of a Robotic Part Feeder Using Queueing Theory. IEEE/RSJ International Conference on Intelligent Robots and Systems. Victoria, B.C., Canada, October 13-17, 1998.
  • Gudmundsson, D., Goldberg, Ken. “Tuning Robotic Part Feeder Parameters to Maximize Throughput” Proceedings of the IEEE International Conference on Robotics and Automation, Albuquerque, NM, April 1997.